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Research Programs

  • Novel Excimer Laser Based Process Technologies for High-Performance Displays and Microelectronics

  • Novel Optoelectronic Envelope Technologies for Energy Efficiency and Recycling

  • Massively Parallel Maskless Nanolithography Technologies

  • Smart Skins: Integrated, Distributed, Multifunctional Sensors on Large-Area, Flexible Substrates

  • Next Generation Lithography Technologies for Nanoscale Device Fabrication

  • High-Resolution, Conformable Lithography on Nonplanar, Large-Area Surfaces for Microelectronic and Biomolecular Devices

  • Photonic Circuits: High-Speed Optical and Electronic Interconnects and Devices with Heterogeneous Integration of Materials and Processes

 

Photonics, Microelectronics, and Microsystems Laboratory
Department of Electrical and Computer Engineering
University of Illinois at Urbana-Champaign

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