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About the Photonics, Microelectronics,
and Microsystems Laboratory

Mission Statement

The central theme in our research programs is to advance the state-of-the-art in microelectronic, optoelectronic and microsystem devices by developing and exploiting novel micro/nanofabrication technologies. These fabrication technologies enable patterning and microstructuring of a variety of organic and inorganic materials -- including new polymers, semiconductors, metals, dielectrics and biological materials -- and producing structures, devices and systems previously not deemed possible. Examples of such devices and systems that are our research objectives include: nanoscale semiconductor devices; smart windows for energy-efficient buildings; integrated multifunctional sensors (smart skins); and electronic modules produced on flexible substrates using novel large-area fabrication techniques. To realize cost-effective fabrication of such devices that will make their implementation in a variety of scientific, commercial and military applications practical, we are developing the necessary combination of novel structures, materials and processes, such as massively parallel maskless nanolithography; excimer laser photoablation in a variety of materials; large-area lithography for flat and flexible displays; high-resolution, conformable lithography on nonplanar surfaces; laser processing of semiconductor films to create active devices; microfluidic devices and biomolecular arrays; and micro-optics and photonic circuits.