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ECE 510

Science, Technology, and Applications

Course Director: Kanti Jain
Description: This course provides a comprehensive foundation in the broad field of micro/nanolithography for graduate students in varied research areas. Lithography is the central process technology used in fabrication of a vast array of micro/nano structures required in microelectronic devices, displays, flexible electronics, microelectromechanical systems, and biotechnology. The course covers the science of microlithography, including optical imaging, photochemistry, and materials issues; the extensive technological developments, including state-of-the-art commercial lithography systems; and the innumerable applications of lithography in diverse fields.
Notes: Course Materials: Chapters from several books, numerous journal articles, proceedings of conferences, and industry reports
Credit: 4 hours
  • Evolution of microelectronic devices; critical role of lithography.
  • Fundamental elements and attributes of microlithographic processes.
  • Types of microlithography; optical, e-beam, X-ray, EUV, nanoimprint.
  • Excimer lasers as dominant sources for lithography. Key features.
  • Optical projection lithography. Primary concepts. Steppers and scanners.
  • Lithography on flexible substrates. Roll-to-roll lithography.
  • Photoresists. Main constituents and functions. Performance parameters.
  • Resolution enhancement techniques. Phase shift masks. Immersion lithography.
  • Maskless lithography. Spatial light modulators. Biotechnology applications.
  • Electron-beam lithography. Electron Sources. Resists. Exposure concepts.
  • X-ray lithography. X-ray sources, synchrotron. Masks. Resists. Applications.
  • Extreme ultraviolet (EUV) lithography. Sources, masks, resists Challenges.
  • Nanoimprint lithography. Basic concepts. Limitations. Applications.
  • UV laser photoablation. Photochemistry. Ablation systems. Key applications.
Course Prerequisites: ECE 444 or 460, or MSE 462, or NPRE 429, or PHYS 402, or Consent of Instructor


Photonics, Microelectronics, and Microsystems Laboratory
Department of Electrical and Computer Engineering
University of Illinois at Urbana-Champaign

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